• Motorized XY sample stage, 50nm resolution—75mm XY movement • Electronic control unit and software • 8M? CMOS camera • XIO long working distance, O_28NA objective • 1 prn optical resolution • Coaxial overhead cold lighting
XYZ Movements on Arms
25rnrn (XYZ) Movement Range: Resolution: < 1 Onm up to Immis XY Movement on Stage Movement Range: 75 mm (XY) Resolution: <50nm Speed: up to Imm/s
• High quality XIO objective, 0.28NA • 1 pm Resolving power Nanomanipulators • 25mm travel XYZ Nanopositioners • 6nm step accuracy (theoretical) • Position information with encoder ndependent XYZ axis movement and movements simultaneously • Continuous motion with < 6nm steps • Intermittent movement identification with 1 pm steps (pm mm range) • Different speed options • Storage and recal of the location information Microcapillary Control Vacuum and gas injection Isolation Acoustic and Vibration Isolation Enclosure
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